Introduction
Main application: Electric fused quartz materia has characteristios such as low OH content, high purity, and strong high-temperature resistance. It is widely used as quartz parts for diffusion process and CVD furnace in semiconductor industry.
Fused Quartz Ingot
Electric Fused Quartz Tube
Electric Fused Quartz Rod
Chemical purity
FLH620L Impurity Typical Value (ppm)
Al
13
B
＜0.01
Ca
0.6
Zr
1
Cu
＜0.01
Fe
0.5
K
0.4
Li
0.4
Mg
＜0.05
Mn
＜0.05
Na
0.6
Ni
＜0.05
Ti
1.30
OH
＜30
FLH621 Impurity Typical Value (ppm)
Al
14.2
B
0.08
Ca
0.6
Zr
—
Cu
＜0.01
Fe
0.23
K
0.25
Li
0.44
Mg
＜0.05
Mn
＜0.05
Na
0.12
Ni
＜0.05
Ti
1.30
OH
≤15
FLH621H Impurity Typical Value (ppm)
Al
8.00
B
0.04
Ca
0.6
Zr
—
Cu
＜0.01
Fe
0.15
K
0.15
Li
0.15
Mg
＜0.05
Mn
＜0.05
Na
0.08
Ni
＜0.05
Ti
1.40
OH
≤15
Physical Property
Mechanical Properties
Density（g/cm3）
Young’s Modulus（GPa）
Poisson’s Ration
Bending Strength（MPa）
Compressive Strength（MPa）
Tensile Strength（MPa）
Torsional Strength（MPa）
Mohs Hardness
2.2
75
0.17
65-95
1100
50
30
6-7
Electrical Properties
Dielectric Constant
Loss Factor
Resistivity（Ω.cm）
3.74
0.0001
1×1016
Thermal Properties
Strain Point（η=1014.5 ℃）
Annealing point（η=1013 ℃）
Softening point（η=107.8 ℃）
Thermal Conductivity(W/m·k)(20℃)
Specific Heat (J/kg.k) (20℃)
Expansion Coefficient( x10 -7 /k)
α ： 20℃ ~ 320 ℃
1150
1215
1710
1.38
749
5.2-5.8
Note: Unless otherwise specified, all values refer to temperatures below 25 ℃. Other sizes available upon requests.
Optical properties
。 Infrared Transmittance Curve.
。 Ultraviolet Transmittance Curve.
Fused quartz material
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